Capacity Limits and Matching Properties of Lateral Flux Integrated Capacitors
Roberto Aparicio

(aparicio@caltech.edu)

Theoretical limits for the capacitance density of lateral flux and quasi-fractal capacitors are studied in detail. These studies include to investigate the efficiency of various capacitive structures such as lateral flux and quasi-fractal structures. This study leads to two new capacitor structures with high lateral-field efficiency. Simulation and experimental results demonstrate higher capacity and superior matching properties compared to the standard horizontal parallel plate and previously reported lateral-field capacitors, while offering comparable or better self-resonance frequency and series resistance.